Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818604 | Method for depositing insulating film on recessed portion having high aspect ratio | Chang-Hun Shin, Seok-Yun Kim, Choon Sik Jeong | 2017-11-14 |
| 9761473 | Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit | Sung Kil CHO | 2017-09-12 |
| 9741574 | Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device | Seok-Yun Kim | 2017-08-22 |
| 9721798 | Method and apparatus for depositing amorphous silicon film | Seung Woo Shin, Woo Duck JUNG, Sung Kil CHO, Wan Suk Oh, Ho Min CHOI +1 more | 2017-08-01 |