Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818604 | Method for depositing insulating film on recessed portion having high aspect ratio | Hai Won Kim, Chang-Hun Shin, Choon Sik Jeong | 2017-11-14 |
| 9741574 | Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device | Hai Won Kim | 2017-08-22 |