Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823133 | EMI/RF shielding of thermocouples | Bopanna Ichettria, Ashish Bhatnagar, Cariappa Baduvamanda | 2017-11-21 |
| 9613846 | Pad design for electrostatic chuck surface | Cheng-Hsiung Tsai, Robert T. Hirahara, Kadthala Ramaya Narendrnath, Manjunatha Koppa, Ross Marshall | 2017-04-04 |