Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9663353 | Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC) | Thorsten Meyer, Reinhard Mahnkopf, Christian Geissler, Andreas Augustin | 2017-05-30 |
| 9550670 | Stress buffer layer for integrated microelectromechanical systems (MEMS) | Christian Geissler, Thorsten Meyer, Reinhard Mahnkopf, Andreas Augustin, Christian Mueller | 2017-01-24 |
| 9543224 | Hybrid exposure for semiconductor devices | Thorsten Meyer, Robert L. Sankman | 2017-01-10 |