Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803286 | Method for etching copper layer | Keiichi Shimoda, Kei Nakayama | 2017-10-31 |
| 9793130 | Method for processing object to be processed | Jun Sato | 2017-10-17 |
| 9691643 | Etching apparatus | Tadashi Kotsugi, Fumiko Yamashita | 2017-06-27 |
| 9660182 | Plasma processing method and plasma processing apparatus | Takashi Sone, Daisuke Urayama, Masato Kushibiki, Nao Koizumi, Wataru Kume +1 more | 2017-05-23 |
| 9647206 | Method for etching layer to be etched | Mitsuru Hashimoto, Takashi Sone, Keiichi Shimoda | 2017-05-09 |