Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691643 | Etching apparatus | Eiichi Nishimura, Tadashi Kotsugi | 2017-06-27 |
| 9660182 | Plasma processing method and plasma processing apparatus | Takashi Sone, Daisuke Urayama, Masato Kushibiki, Nao Koizumi, Wataru Kume +1 more | 2017-05-23 |