Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9670579 | Method for depositing a chlorine-free conformal SiN film | Dennis M. Hausmann, Jon Henri, Bart van Schravendijk | 2017-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9670579 | Method for depositing a chlorine-free conformal SiN film | Dennis M. Hausmann, Jon Henri, Bart van Schravendijk | 2017-06-06 |