Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633896 | Methods for formation of low-k aluminum-containing etch stop films | Pramod Subramonium, Nagraj Shankar | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633896 | Methods for formation of low-k aluminum-containing etch stop films | Pramod Subramonium, Nagraj Shankar | 2017-04-25 |