Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837286 | Systems and methods for selectively etching tungsten in a downstream reactor | Dengliang Yang, Helen Zhu, George Matamis, Joon Hong Park, Joydeep Guha | 2017-12-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837286 | Systems and methods for selectively etching tungsten in a downstream reactor | Dengliang Yang, Helen Zhu, George Matamis, Joon Hong Park, Joydeep Guha | 2017-12-05 |