Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837286 | Systems and methods for selectively etching tungsten in a downstream reactor | Dengliang Yang, George Matamis, Brad Jacobs, Joon Hong Park, Joydeep Guha | 2017-12-05 |
| 9558928 | Contact clean in high-aspect ratio structures | Bayu Thedjoisworo, Linda Marquez, Joon Hong Park | 2017-01-31 |