Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761457 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2017-09-12 |