Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617637 | Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems | Brannon Kelley, Jaswinder Guiliani, Akhil Singhal | 2017-04-11 |
| 9570289 | Method and apparatus to minimize seam effect during TEOS oxide film deposition | — | 2017-02-14 |