Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828240 | Integrated CMOS back cavity acoustic transducer and the method of producing the same | Fang Liu, Brian H. Kim, Anthony D. Minervini | 2017-11-28 |
| 9802815 | Method for MEMS structure with dual-level structural layer and acoustic port | Mei-Lin Chan, Martin Lim, Fariboz Assaderaghi, Erhan Polatkan Ata | 2017-10-31 |
| 9617141 | MEMS device and process for RF and low resistance applications | Martin Lim, Xiang Li, Li-Wen Hung | 2017-04-11 |
| 9540230 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Martin Lim, Kegang Huang, Igor Tchertkov | 2017-01-10 |