LS

Lina Shi

IS Institute Of Microelectronics Of The Chinese Academy Of Sciences: 1 patents #22 of 62Top 40%
Overall (2017): #333,198 of 506,227Top 70%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9546964 Defect detection system for extreme ultraviolet lithography mask Hailiang Li, Changqing Xie, Ming-Chang Liu, Dongmei Li, Jiebin Niu +1 more 2017-01-17