Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546964 | Defect detection system for extreme ultraviolet lithography mask | Hailiang Li, Changqing Xie, Ming-Chang Liu, Dongmei Li, Lina Shi +1 more | 2017-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546964 | Defect detection system for extreme ultraviolet lithography mask | Hailiang Li, Changqing Xie, Ming-Chang Liu, Dongmei Li, Lina Shi +1 more | 2017-01-17 |