Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752943 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Andre Röth, Bernhard Winkler +1 more | 2017-09-05 |
| 9663355 | Method and structure for creating cavities with extreme aspect ratios | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann | 2017-05-30 |
| 9641153 | Method of forming a resonator | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Thomas Santa, Markus Burian | 2017-05-02 |