Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798132 | Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices | Roland Meier, Klemens Pruegl, Thomas Popp, Raimund Foerg | 2017-10-24 |
| 9790086 | Micromechanical semiconductor sensing device | Franz-Peter Kalz, Horst Theuss, Khalil Hosseini, Joachim Mahler, Manfred Mengel | 2017-10-17 |
| 9752943 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Andre Röth +1 more | 2017-09-05 |
| 9708182 | Methods for producing a cavity within a semiconductor substrate | Andreas Behrendt, Kai-Alexander Schreiber, Sokratis Sgouridis, Martin Zgaga | 2017-07-18 |
| 9598277 | Cavity structures for MEMS devices | Andreas Zankl, Klemens Pruegl, Stefan Kolb | 2017-03-21 |
| 9567211 | Micromechanical semiconductor sensing device | Franz-Peter Kalz, Horst Theuss, Khalil Hosseini, Joachim Mahler, Manfred Mengel | 2017-02-14 |
| 9546923 | Sensor structures, systems and methods with improved integration and optimized footprint | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth +1 more | 2017-01-17 |