Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673785 | Packaged MEMS device comprising adjustable ventilation opening | Christian Herzum, Roland Helm, Michael Kropfitsch, Stefan Barzen | 2017-06-06 |
| 9591408 | Adjustable ventilation openings in MEMS structures | Alfons Dehe | 2017-03-07 |
| 9580299 | MEMS device and method of making a MEMS device | Alfons Dehe, Christian Herzum | 2017-02-28 |
| 9540226 | System and method for a MEMS transducer | Wolfgang Klein, Stefan Barzen, Alfons Dehe | 2017-01-10 |