Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673785 | Packaged MEMS device comprising adjustable ventilation opening | Martin Wurzer, Roland Helm, Michael Kropfitsch, Stefan Barzen | 2017-06-06 |
| 9580299 | MEMS device and method of making a MEMS device | Alfons Dehe, Martin Wurzer | 2017-02-28 |