Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805908 | Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam | Stefan Lanio | 2017-10-31 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Stefan Lanio, Jürgen Frosien, Benjamin John Cook | 2017-05-30 |
| 9666406 | Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device | Stefan Lanio, Benjamin John Cook | 2017-05-30 |