Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666404 | Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam | — | 2017-05-30 |
| 9666405 | System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device | Stefan Lanio, Matthias Firnkes, Benjamin John Cook | 2017-05-30 |
| 9601303 | Charged particle beam device and method for inspecting and/or imaging a sample | — | 2017-03-21 |
| 9595417 | High resolution charged particle beam device and method of operating the same | — | 2017-03-14 |
| 9589763 | Method for detecting signal charged particles in a charged particle beam device, and charged particle beam device | — | 2017-03-07 |