Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828711 | Needle plate replacement device with lock | Koji Maeda, Yoshitaka Bamba | 2017-11-28 |
| 9593422 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Mamoru Umemoto, Kazuyuki Okuda | 2017-03-14 |