Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D791091 | Pattern wafer | Hiromi Okada, Shinya Morita, Satoshi Aizawa, Masayoshi Minami, Masayuki Yamada | 2017-07-04 |
| 9593422 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Mamoru Umemoto | 2017-03-14 |