Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779919 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa | 2017-10-03 |
| 9566821 | Plasma processing apparatus and plasma processing method | Ryoji Nishio, Shinji Obama | 2017-02-14 |