Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805915 | Plasma processing apparatus | Masaharu Gushiken, Megumu Saitou | 2017-10-31 |
| 9566821 | Plasma processing apparatus and plasma processing method | Takamasa Ichino, Shinji Obama | 2017-02-14 |