Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta +1 more | 2017-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Zhaohui Cheng, Ruriko Tsuneta +1 more | 2017-11-28 |