Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719723 | Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate | Hongwei Xing, Huihui Mu, Min Yuan, Hequn Zhang | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719723 | Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate | Hongwei Xing, Huihui Mu, Min Yuan, Hequn Zhang | 2017-08-01 |