Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748088 | Method, storage medium and system for controlling the processing of lots of workpieces | Gero Grau, Steffen Kalisch, Joerg Weigang, William J. Fosnight, Detlef Pabst | 2017-08-29 |
| 9632499 | Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits | Gero Grau, William J. Fosnight, Detlef Pabst | 2017-04-25 |