Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748088 | Method, storage medium and system for controlling the processing of lots of workpieces | Gero Grau, Steffen Kalisch, Joerg Weigang, Chinmay Oza, Detlef Pabst | 2017-08-29 |
| 9632499 | Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits | Chinmay Oza, Gero Grau, Detlef Pabst | 2017-04-25 |
| 9564350 | Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod | Stephanie Waite | 2017-02-07 |