Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Kaoru Hirata, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita, Masaaki Nagase | 2017-12-12 |
| 9791867 | Flow control device equipped with flow monitor | Masaaki Nagase, Atsushi Hidaka, Kouji Nishino | 2017-10-17 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Kaoru Hirata, Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino +2 more | 2017-08-29 |
| 9733649 | Flow control system with build-down system flow monitoring | Masaaki Nagase, Atsushi Hidaka, Kouji Nishino | 2017-08-15 |
| 9702781 | Leakage detection device and fluid controller including same | Ryousuke Dohi, Tsutomu Shinohara, Kouji Nishino, Toshio Doh, Michio Yamaji | 2017-07-11 |
| 9651467 | Raw material fluid density detector | Yoshihiro Deguchi, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Michio Yamaji +1 more | 2017-05-16 |
| 9638560 | Calibration method and flow rate measurement method for flow rate controller for gas supply device | Masaaki Nagase, Yohei Sawada, Tooru Hirai, Kazuyuki Morisaki, Kouji Nishino +1 more | 2017-05-02 |
| 9632511 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Katsuyuki Sugita | 2017-04-25 |
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Masaaki Nagase, Kaoru Hirata, Atushi Hidaka, Kouji Nishino, Takeshi Nakamura | 2017-04-25 |
| 9574917 | Pressure type flow rate control device | Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Kouji Nishino | 2017-02-21 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Ryousuke Dohi, Kouji Nishino | 2017-01-31 |