Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita, Masaaki Nagase | 2017-12-12 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino +2 more | 2017-08-29 |
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Masaaki Nagase, Atushi Hidaka, Kouji Nishino, Nobukazu Ikeda, Takeshi Nakamura | 2017-04-25 |
| 9632511 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita | 2017-04-25 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Atsushi Hidaka, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2017-01-31 |