Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709891 | Positive resist composition, resin used for the positive resist composition, compound used for synthesis of the resin and pattern forming method using the positive resist composition | Shinichi Kanna | 2017-07-18 |
| 9541831 | Positive resist composition and method of pattern formation with the same | Shinichi Kanna, Haruki Inabe | 2017-01-10 |