Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835945 | Positive resist composition and method of pattern formation with the same | Hiromi Kobayashi, Shinichi Kanna | 2017-12-05 |
| 9798235 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Hiromi Kobayashi | 2017-10-24 |
| 9703196 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Hiromi Kobayashi | 2017-07-11 |
| 9541831 | Positive resist composition and method of pattern formation with the same | Hiromi Kanda, Shinichi Kanna | 2017-01-10 |