Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9825145 | Method of manufacturing silicon carbide semiconductor device including forming an electric field control region by a laser doping technology | Koh Yoshikawa, Haruo Nakazawa, Yasukazu Seki | 2017-11-21 |
| 9786749 | Semiconductor device having a voltage resistant structure | Koh Yoshikawa, Haruo Nakazawa, Yasukazu Seki, Katsuya Okumura | 2017-10-10 |
| 9779968 | Method for processing semiconductor substrate and method for manufacturing semiconductor device in which said processing method is used | — | 2017-10-03 |
| 9716008 | Apparatus for doping impurities, method for doping impurities, and method for manufacturing semiconductor device | — | 2017-07-25 |
| 9659775 | Method for doping impurities, method for manufacturing semiconductor device | Akihiro Ikeda, Hiroshi Ikenoue, Tanemasa Asano, Haruo Nakazawa, Koh Yoshikawa +1 more | 2017-05-23 |
| 9659774 | Impurity introducing method, impurity introducing apparatus, and method of manufacturing semiconductor element | Haruo Nakazawa, Masaaki Ogino | 2017-05-23 |
| 9577032 | Semiconductor device | — | 2017-02-21 |
| 9564334 | Method of manufacturing a semiconductor device | Haruo Nakazawa, Tsunehiro Nakajima, Masaaki Ogino, Masaaki Tachioka | 2017-02-07 |
| 9548205 | Method of manufacturing a semiconductor device | Haruo Nakazawa, Masaaki Ogino, Tsunehiro Nakajima, Masaaki Tachioka | 2017-01-17 |