Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9782870 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2017-10-10 |
| 9579768 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2017-02-28 |
| 9561575 | Adjusting a substrate polishing condition | Toru Maruyama | 2017-02-07 |