Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9782870 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2017-10-10 |
| 9669515 | Polishing apparatus | Yoshihiro Mochizuki, Keisuke Suzuki, Takahiro Tajiri, Souichirou Ichioka | 2017-06-06 |
| 9579768 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2017-02-28 |