Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Koki Tanaka | Nippon Steel | 2 |
| 2 | Tadashi Aoto | Tokyo Electron Limited | 1 |
| 2 | Eiichi Sugawara | Tokyo Electron Limited | 1 |
| 2 | Yukio Naito | Tokyo Electron Limited | 1 |
| 2 | Masato Horiguchi | Tokyo Electron Limited | 1 |