Showing 1–9 of 9 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Steve Drummond | Axcelis Technologies | 2 |
| 1 | Kourosh Saadatmand | Axcelis Technologies | 2 |
| 3 | Kenneth L. Hilts | Mobius Imaging | 1 |
| 3 | James A. Robbins | RTX (Raytheon) | 1 |
| 3 | James Stabile | — | 1 |
| 3 | Michael C. Marden | Goodrich | 1 |
| 3 | Stephen Douglas Ammon | Tbl Licensing | 1 |
| 3 | Anthony Martin Duys | Polycom | 1 |
| 3 | Daniel Distaso | Varian Semiconductor Equipment Associates | 1 |
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