Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Jeroen Johannes Sophia Maria Mertens | Asml Netherlands B.V. | 10 |
| 2 | Carlo Cornelis Maria Luijten | Asml Netherlands B.V. | 3 |
| 3 | Pieter Mulder | Asml Netherlands B.V. | 1 |
| 3 | Paolo Nervo | Dispensing Technologies B.V. | 1 |
| 3 | Christian Wagner | Asml Netherlands B.V. | 1 |