Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837245 | Micro stage for particle beam column using piezo elements as actuator | Byeng Jin Kim, Do Jin Seong | 2017-12-05 |
| 9673016 | Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip | Tae-Sik Oh, Dae Wook Kim, Hyung Woo Kim, Seung Jun Ahn | 2017-06-06 |
| 9666407 | Electrostatic quadrupole deflector for microcolumn | Tae-Sik Oh, Dae Wook Kim | 2017-05-30 |