Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837245 | Micro stage for particle beam column using piezo elements as actuator | Ho Seob Kim, Byeng Jin Kim | 2017-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837245 | Micro stage for particle beam column using piezo elements as actuator | Ho Seob Kim, Byeng Jin Kim | 2017-12-05 |