Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721754 | Method and apparatus for processing a substrate with a focused particle beam | Petra Spies, Thorsten Hofmann | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721754 | Method and apparatus for processing a substrate with a focused particle beam | Petra Spies, Thorsten Hofmann | 2017-08-01 |