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Petra Spies

CG Carl Zeiss Smt Gmbh: 1 patents #89 of 237Top 40%
Overall (2017): #280,796 of 506,227Top 60%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9721754 Method and apparatus for processing a substrate with a focused particle beam Tristan Bret, Thorsten Hofmann 2017-08-01