Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9639007 | Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus | Timo Laufer | 2017-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9639007 | Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus | Timo Laufer | 2017-05-02 |