Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Hiroshi Akasaka, Masayoshi Ikeda, Kazuhiro Kimura, Yasushi Kamiya | 2017-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Hiroshi Akasaka, Masayoshi Ikeda, Kazuhiro Kimura, Yasushi Kamiya | 2017-02-07 |