Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852879 | Ion beam processing method and ion beam processing apparatus | Yasushi Kamiya, Yuta Konno | 2017-12-26 |
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Masayoshi Ikeda, Kazuhiro Kimura, Yasushi Kamiya, Tomohiko Toyosato | 2017-02-07 |