Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835639 | Gripping mechanism | Kazuyuki Oguri, Tomohiro Endo, Toshiaki Ohtake, Hidenobu Kawada | 2017-12-05 |
| 9711255 | Ultraviolet-emitting material and ultraviolet light source | Hiroyuki Kato, Kazufumi Tanaka | 2017-07-18 |
| 9689665 | Position detection apparatus, imprint apparatus, and method for manufacturing device | — | 2017-06-27 |
| 9625836 | Interferometer, lithography apparatus, and method of manufacturing article | Wataru Yamaguchi, Hideki Ina | 2017-04-18 |
| 9566741 | Imprint method, imprint apparatus, and article manufacturing method | Kazuki Nakagawa, Noriyasu Hasegawa, Yosuke Murakami | 2017-02-14 |