Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841323 | Spectroscopic unit and spectroscopic device using same | Yoshitaka Teraoka, Katsutoshi Tsurutani | 2017-12-12 |
| 9625836 | Interferometer, lithography apparatus, and method of manufacturing article | Takahiro Matsumoto, Hideki Ina | 2017-04-18 |