Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852935 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2017-12-26 |
| 9761478 | Substrate transport apparatus | Robert T. Caveney | 2017-09-12 |
| 9670010 | Substrate loading and unloading station with buffer | David Beaulieu, Peter van der Meulen | 2017-06-06 |
| 9656386 | Coaxial drive vacuum robot | Robert T. Caveney | 2017-05-23 |
| 9601362 | High speed substrate aligner apparatus | Jairo T. Moura, Martin Hosek, Todd Bottomley | 2017-03-21 |