Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852935 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2017-12-26 |
| 9761478 | Substrate transport apparatus | Ulysses Gilchrist | 2017-09-12 |
| 9751209 | Compact direct drive spindle | — | 2017-09-05 |
| 9656386 | Coaxial drive vacuum robot | Ulysses Gilchrist | 2017-05-23 |
| 9623555 | Dual arm robot | Alexander Krupyshev, Martin R. Elliott, Christopher Hofmeister | 2017-04-18 |
| 9570330 | Substrate processing apparatus | Christopher Hofmeister | 2017-02-14 |